辅助气体对激光打孔的影响  

Study on the influence of assisted gas on laser drilling

作　　者：王智勇[1] 陈铠[1] 左铁钏[1] Th.Beck H.Weber 

机构地区：[1]国家产学研激光技术中心,北京工业大学北京100022 [2]德国柏林工业大学光学研究所

出　　处：《激光杂志》2000年第6期44-46,共3页Laser Journal

基　　金：北京市科技新星计划资助

摘　　要：辅助气体是影响激光打孔质量的一个重要因素。本文通过实验分析了辅助气体类型、气压对不同的材料激光打孔的孔径和孔壁粘滞物吹除的影响。提出了激光打孔中有效利用气压的概念 ,指出可采用直径非常小的孔来产生很强的气流以提高有效利用气压。并利用激光打孔后的孔作为喷嘴 ,获得了重复率高、倾斜度小和工件表面干净的激光打孔。Assisted gas is one of the key factors that influence the quality of laser drilling.In this paper,the influence of different assisted gases and gas pressure for different materials on hole diameter and blowing ability for deposit liquid on the wall of the hole is studied experimentally.Further more,a new conception,drilling effective pressure,is proposed.As well as a new method for laser drilling using small diameter nozzle to improve effective pressure is analyzed.In the experiments,the nozzle,produced by laser drilling,is employed to acquire high drilling reproducibility,low hole taper and laser drilling with cleaning surface.

关 键 词：激光打孔 辅助气体 喷嘴 

分 类 号：TN249[电子电信—物理电子学]