拼接式钢带光栅编码器测角误差分析与修正  

Error analysis and correction of scale tape grating encoder

作　　者：潘年[1,2] 马文礼[1] 

机构地区：[1]中国科学院光电技术研究所,四川成都610209 [2]中国科学院大学,北京100049

出　　处：《中国光学》2013年第5期788-794,共7页Chinese Optics

基　　金：国家自然科学基金资助项目(No.60978050)

摘　　要：针对望远镜对高精度测角技术的要求,分析了机械安装偏心、加工椭圆度误差、轴系晃动等对新型拼接式钢带光栅编码器测角的影响,并制定了相位差为90°的4读数头软件细分测角方案。在机械安装偏心为10μm、加工椭圆度为2μm、轴系晃动为0.6″的实验平台上进行了逆时针和顺时针测角实验,两组实验测角误差RMS值分别为0.393″和0.488″。实验表明:该测角方案能消除机械安装偏心、加工椭圆度误差等对测角数据的影响,实现了亚角秒级测角。To satisfy rigid performance specifications of goniometry for a telescope , this paper analyzes the im-pacts of the mechanical installation eccentric , roundness error and the shafting sloshing on angle measurements by an encoder with a scale tape grating , and develops a software subdivision angle measurement program based on 4 reading heads and 90°phase difference.The counterclockwise and clockwise angle measuring experi-ments are performed on a experimental platform with a mechanical installation eccentric of 10 μm, roundness error of 2 μm and shafting sloshing of 0.6″.The measuring angle error RMS values from two sets of experi-ments are 0.393″, 0.488″, respectively.The experiments prove that the program can eliminate the angular measurement errors caused by the mechanical installation eccentric , machining roundness error and the shaft-ing sloshing.It achieves arcsecond angle measurements .

关 键 词：望远镜 编码器 钢带光栅尺 角度测量 误差分析 

分 类 号：TH743[机械工程—光学工程] TN762[机械工程—仪器科学与技术]