Design and fabrication of a high-performance evanescently coupled waveguide photodetector  

作　　者：刘少卿 杨晓红 刘宇 李彬 韩勤 

机构地区：[1]State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences

出　　处：《Chinese Physics B》2013年第10期614-618,共5页中国物理B（英文版）

基　　金：Project supported by the High Technology Research and Development Program of China (Grant Nos.2012AA012202 and 2013AA031401);the National Basic Research Program of China (Grant No.2012CB933503);the National Natural Science Foundation of China (Grant Nos.61176053,61274069,and 61021003)

摘　　要：In this paper, we present the design, fabrication, and measurement of an evanescently coupled waveguide photode- tector operating at 1.55 gm, which mainly comprises a diluted waveguide, a single-mode rib waveguide and a p-i-n photodiode with an extended optical matching layer. The optical characteristics of this structure are studied by using a three-dimensional finite-difference time-domain （3D FDTD） method. The photodetector exhibits a high 3-dB bandwidth of more than 35 GHz and a responsivity of 0.291 A/W at 1550 nm directly coupled with a cleaved fiber. Moreover, a linear response of more than 72-mW optical power is achieved, where a photocurrent of more than 21 mA is obtained at a reverse bias voltage of 3 V.In this paper, we present the design, fabrication, and measurement of an evanescently coupled waveguide photode- tector operating at 1.55 gm, which mainly comprises a diluted waveguide, a single-mode rib waveguide and a p-i-n photodiode with an extended optical matching layer. The optical characteristics of this structure are studied by using a three-dimensional finite-difference time-domain （3D FDTD） method. The photodetector exhibits a high 3-dB bandwidth of more than 35 GHz and a responsivity of 0.291 A/W at 1550 nm directly coupled with a cleaved fiber. Moreover, a linear response of more than 72-mW optical power is achieved, where a photocurrent of more than 21 mA is obtained at a reverse bias voltage of 3 V.

关 键 词：HIGH-PERFORMANCE diluted waveguide evanescent coupling waveguide photodiode 

分 类 号：TN36[电子电信—物理电子学]