用低温Raman散射光谱研究不同处理的CdZnTe表面  

Raman scattering spectra under low temperature of several typical Cd_(0.96) Zn_(0.04) Te surfaces

作　　者：裴慧元[1] 方家熊[1] 

机构地区：[1]传感技术国家重点实验室中国科学院上海技术物理研究所,上海200083

出　　处：《功能材料与器件学报》2000年第4期397-402,共6页Journal of Functional Materials and Devices

摘　　要：利用低温Raman散射光谱分析 ,比较了 4种典型处理的Cd0 .96Zn0 .0 4 Te表面声子散射信号和表面元素沉积的变化。对 2 2 0 90cm- 1的反斯托克斯分量进行分析得出 ,BM液腐蚀后的表面晶格完整性最好 ;LB液处理有利于进一步改善表面粗糙度和表面漏电流 ;离子轰击的表面缺陷多 ,质量差 ,但对制备良好欧姆接触的电极有现实意义。实验证明Raman散射光谱对于探测表面上元素的沉积和分析表面质量的变化 ,进而优化表面处理工艺十分有效。In this paper, Raman scattering spectra under low temperature were used to analyze and compare the phonons of Cd 0.96 Zn 0.04 Te surface lattice and elemental deposits on the surfaces, which had been treated by 4 different typical methods. By investigating the anti Stokes part in range -220^-90 cm -1 , some results were concluded: mechanical polishing brings a damaged surface layer, where damage and defect accumulate; after BM solution treatment, the best surface perfection was obtained; LB solution can further improved roughness and leakage current of the Cd 0.96 Zn 0.04 Te surface, and then ion bombardment leaves behind much defects on the surface, but it ensures the metal/Cd 0.96 Zn 0.04 Te contact for good adhesion. It is shown Raman spectrum under low temperature is very effective in chemical identifying the elemental deposits and analyzing quality transformation of material surface, and then can be used in optimizing surface treatment technique for good surface quality.

关 键 词：Cd0.96Zn0.04Te Raman散射光谱 表面处理 半导体 

分 类 号：TN304.26[电子电信—物理电子学] O657.37[理学—分析化学]