新型纳米材料在微电子技术中的应用探究  

Application of New Nanometer Materials in Microelectronics

作　　者：赵四化[1] 

机构地区：[1]成都工业学院电气与电子工程系,成都611730

出　　处：《微电子学》2013年第4期577-580,共4页Microelectronics

摘　　要：针对特征尺寸减小给微电子技术带来的问题,简述了纳米材料的几种量子效应;着重介绍了新型纳米半导体材料(碳纳米管和石墨烯)在后摩尔时代的微电子技术中的应用;探讨了碳纳米管和石墨烯在纳电子器件、集成电路,以及太赫兹技术、量子信息学中的可能应用。Aiming at issues associated with shrinking feature size in microelectronics, quantum effects of nanometer materials were discussed in brieL Application of novel nanometer semiconductor materials, such as carbon nanotubes and graphene, to microelectronic technology in Post Moore Era was described in particular. Moreover, potential applications of carbon nanotubes and graphene in integrated circuits and nano-micro-electronic devices, as well as terahertz technology and quantum informatics, were examined.

关 键 词：碳纳米管 石墨烯 纳米材料 微电子技术 

分 类 号：TN304[电子电信—物理电子学]