A compact neural recording interface based on silicon microelectrode  

作　　者：HAN JianQiang ZHANG Xu PEI WeiHua GUI Qiang LIU Ming CHEN HongDa 

机构地区：[1]State Key Laboratory on Integrated Optoelectronic,Institute of Semiconductors,Chinese Academy of Sciences

出　　处：《Science China(Technological Sciences)》2013年第11期2808-2813,共6页中国科学（技术科学英文版）

基　　金：supported in part by the National Natural Science Foundation of China(Grant Nos.61076023,61275200,31070965);the National Basic Research Program of China("973" project)(Grant No.2011CB933203);the National High-Tech Research and Development Program of China("863" Project)(Grant No.2012AA030308)

摘　　要：A prototype of hybrid neural recording interface has been developed for extracellular neural recording. It consists of a silicon-based plane microelectrode array and a CMOS low noise neural amplifier chip. The neural amplifier chip is designed and implemented in 0.18 μm N-well CMOS 1P6M technology. The area of the neural preamplifier is only 0.042 mm2 with a gain of 48.3 dB. The input equivalent noise is 4.73 btVrms within pass bands of 4 kHz. To avoid cable tethering for high dense mul- tichannel neural recording interface and make it compact, flip-chip bonding is used to integrate the preamplifier chip and the microelectrode together. The hybrid device measures 3 mm×5.5 mm×330μm, which is convenient for implant or in-vivo neu- ral recording. The hybrid device was testified in in-vivo experiment. Neural signals were recorded from hippocampus region of anesthetized Sprague Dawley rats successfully.

关 键 词：neural recording interface silicon microelectrode CMOS preamplifier flip-chip bonding hybrid device 

分 类 号：TN409[电子电信—微电子学与固体电子学]