基于双路比值条纹计数法的法布里-珀罗腔位移传感器  

Dual-Fiber Fabry-Perot Displacement Sensor Based on Ratio Method Fringe Counting Demodulation

作　　者：舒卓[1] 童斌[1] 徐春晖[1] 陈凤翔[1] 黎敏[1] 

机构地区：[1]武汉理工大学物理系,湖北武汉430070

出　　处：《中国激光》2013年第10期127-130,共4页Chinese Journal of Lasers

基　　金：国家自然科学基金(61177076);中央高校基本科研业务费专项基金(2012-Ia-020;2013-Ia-038)

摘　　要：为了解决普通条纹计数法在余弦信号极大／极小值位置难于判向的问题，提出一种基于双法布里-珀罗（F-P）干涉仪的比值条纹计数法。利用正切信号在相位为π／2整数倍时发生跳变的特点，取两路正交余弦干涉信号的比值（即为正切信号），再通过对跳变脉冲计数，在测量相位差大小的同时，实现了对相位变化方向的判定。本方法对传感器两光路之间的初始相位差无严格要求，安装调试简单。实验结果表明，以位移传感为例，系统在0～1mm的测量范围内，线性相关系数达到0．9999，线性度为0．306％，误差限值为±3μm。Conventional fringe counting method has difficulty in direction judgment, especially at the peak or valley of cosine signal. In order to overcome this problem, we present a double Fabry-Perot （F-P） interferometer using a ratio fringe counting approach. Since the value of tangent signal jumps at which phase is an integer multiple of π/2, we use two orthogonal cosine interference signal ratio to get the tangent signal. Meantime, by counting the number of pulse, we can not only measure the phase difference but also judge the direction change. This approach has no strict requirement for initial phase difference of two optic paths. Itts very feasible for manufacturing, and experimental results demonstrate the linearly dependent coefficient up to 0. 9999, a good linearity to 0. 306 % and a displacement resolution to ±3 μm within a dynamic range from 0 to lmm of the sensor system.

关 键 词：传感器 光纤位移传感器 法布里-珀罗干涉仪 条纹计数法 比值 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]