双阵列式电容传感器电极个数的选取  

Selection of electrode number of double array type capacitive sensor

作　　者：徐弈辰 杨道业[1] 张智[1] 程明霄[1] 施源[1] 

机构地区：[1]南京工业大学自动化与电气工程学院,江苏南京210031

出　　处：《传感器与微系统》2013年第11期44-47,51,共5页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(51106070)

摘　　要：利用传感器相邻极板之间灵敏场不均匀的特点,建立了一种新型双阵列式电容传感器,并引入新的目标函数来评价灵敏场在某个区域幅值的大小。通过有限元仿真,分析双阵列式电容传感器电极数为6,8,12,16时对目标函数的影响,选取双阵列式电容传感器的电极数,使传感器综合性能最优。A new double array type capacitive sensor is designed and new objective functions are introduced to evaluate amplitude of sensitive field in a region, based on non-uniform characteristics of sensitivity field of adjacent sensor plate. The influence of electrode number of double array type capacitive sensor are 6, 8,12 and 16 on objective function are analyzed, by the method of finite element simulation, select electrode numbers of double array capacitive sensor to make sensor comprehensive performance optimal.

关 键 词：双阵列式电容传感器 有限元方法 区域幅值最大化参数 电极数选取 

分 类 号：TB934[一般工业技术—计量学]