基于BTO/CNTs复合压电薄膜制备  

Preparation of composite piezoelectric film based on BTO/CNTs

作　　者：李俊漾[1] 张强[1] 臧俊斌[2] 高立波[1] 海振银 薛晨阳[1] 

机构地区：[1]中北大学电子测试国家重点实验室,山西太原030051 [2]中北大学朔州电力学院,山西朔州036000

出　　处：《传感器与微系统》2013年第11期75-78,共4页Transducer and Microsystem Technologies

基　　金：山西省自然科学基金资助项目(2011011013-2)

摘　　要：介绍了一种新型的钛酸钡/碳纳米管(BTO/CNTs)压电薄膜的制备方法及其特性研究,利用BTO纳米颗粒、CNTs和聚二甲基硅氧烷(PDMS)作为原材料,采用改进的sol-gel法制备出厚度均匀的复合薄膜,使用油浴极化法在一定条件下对复合薄膜极化。并利用SEM表征制备复合薄膜的掺杂效果,发现CNTs的加入加快了电子的转移速率。在周期性的外力作用下,发现其电压输出波形符合阻尼振荡模型,并测试不同配比下复合薄膜的压电电压输出,得出最佳BTO/CNTs质量比为10∶1时,薄膜的输出电压最高可达4 V。A novel preparation method and characterization of barium titanate/carbon nanotubes （BTO/CNTs） piezoelectric thin film is introduced, using BTO nanoparticles, CNTs and polydimethylsiloxane （ PDMS ） as raw material, and composite thin films with uniform thickness are prepared by improved sol-gel method then polarized in an oil bath under certain conditions. Further, doping effect of the prepared composite thin films are characterized by SEM image and it is found that the added CNTs accelerate electron transfer rate. In periodic external force, the voltage output is found to be in accordance with the damping vibration model and the piezoelectric voltage output of composite film is measured in different matching. It is concluded that the best BTO/CNTs mass ratio is 10：1 and output voltages of the film can reach to 4 V.

关 键 词：碳纳米管 压电复合薄膜 极化 阻尼振荡 

分 类 号：TB34[一般工业技术—材料科学与工程]