Suppressing the mechanical quadrature error of a quartz double-H gyroscope through laser trimming  

作　　者：赵克 冯立辉 王茜蒨 刘明智 王本国 崔芳 孙雨南 

机构地区：[1]School of Optoelectronics, Beijing Institute of Technology

出　　处：《Chinese Physics B》2013年第11期622-628,共7页中国物理B（英文版）

基　　金：Project supported by the National Natural Science Foundation of China(Grant No.61027007)

摘　　要：In this paper, we introduce a z-axis quartz gyroscope using a double-H tuning fork, which has a high sensitivity. However, it also causes a large mechanical quadrature error. The laser trimming method is used to suppress this error at quartz level. The trimming law is obtained through the finite element method （FEM）. A femtosecond laser processing system is used to trim the gold balancing masses on the beams, and experimental results are basically consistent with the simulated ones. The mechanical quadrature error is suppressed by 96%, from 26.3° s-1 to 1.1° s-1. Nonlinearity changes from 1.48% to 0.30%, angular random walk （ARW） is reduced from 2.19° h-1/2 to 1.42° h-1/2, and bias instability is improved by a factor of 7.7, from 197.6° h-1 to 25.4° h-1.In this paper, we introduce a z-axis quartz gyroscope using a double-H tuning fork, which has a high sensitivity. However, it also causes a large mechanical quadrature error. The laser trimming method is used to suppress this error at quartz level. The trimming law is obtained through the finite element method （FEM）. A femtosecond laser processing system is used to trim the gold balancing masses on the beams, and experimental results are basically consistent with the simulated ones. The mechanical quadrature error is suppressed by 96%, from 26.3° s-1 to 1.1° s-1. Nonlinearity changes from 1.48% to 0.30%, angular random walk （ARW） is reduced from 2.19° h-1/2 to 1.42° h-1/2, and bias instability is improved by a factor of 7.7, from 197.6° h-1 to 25.4° h-1.

关 键 词：femtosecond laser trimming micro-electro-mechanical system （MEMS） gyroscope finite elementmethod （FEM） simulation 

分 类 号：TN249[电子电信—物理电子学]