一种新型位移与角度同时测量系统的设计（英文）  

Design of a New Simultaneous Measurement System of Displacement and Angle

作　　者：王选择[1,2] 王诣[1] 翟中生[1,2] 

机构地区：[1]湖北工业大学机械工程学院,武汉430068 [2]湖北省现代制造质量工程重点实验室,武汉430068

出　　处：《纳米技术与精密工程》2013年第6期562-566,共5页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(51175154,51005072);湖北省杰出青年人才基金资助项目(2010CDA088);教育厅中青年资助项目(Q20101405);湖北省科技厅资助项目(2010CDB03104)

摘　　要：为了消除悬臂梁移动时产生的阿贝偏角误差,设计了一种可同时测量角度与位移的精密测量系统.首先,在激光干涉原理的基础上,通过改变光路将角度转换为可以反映干涉系统中光程差变化的位移量.其次,采用压电陶瓷(PZT)驱动柔性铰链机构,产生运动的干涉条纹.最后,采用四细分条纹计数辨向方法,进行运动干涉条纹的接收与处理实验,结果表明:在条纹宽度处于合适值时,系统满足了对阿贝偏角精密测量的要求.A new simultaneous measurement system of displacement and angle is designed to compensate for Abbe declination error caused by cantilever movement. First, based on the theory of laser interfer ence, the angle is converted to the displacement which can reflect the change of optical path difference in the interference system, by changing the path. Second, interference fringes will produce steady periodici ty movement by promoting the flexure hinge with piezoelectric ceramics （PZT）. Finally, the method of 4 foldfrequency subdivision and direction judgment is adopted, and the experiment on the receiving and processing of dynamic width, the system can fringes is conducted. The experimental result shows that with an appropriate fringe meet the requirement for the nrecision measurement of Abbe declination

关 键 词：阿贝偏角 同时测量 干涉条纹 

分 类 号：TH822[机械工程—仪器科学与技术] TH712[机械工程—精密仪器及机械]