偏压占空比对类石墨碳薄膜摩擦学性能的影响  

Effect of the Bias Duty Cycle on the Tribological Properties of Graphite-like Carbon Film

作　　者：王永欣 赵文杰 李金龙 王立平 陈建敏 

机构地区：[1]中国科学院宁波材料技术与工程研究所表面工程事业部,浙江宁波315201

出　　处：《润滑与密封》2013年第11期38-43,49,共7页Lubrication Engineering

基　　金：国家自然科学基金项目(51202261);宁波市自然科学基金项目(2012A610105);中国博士后科学基金项目(2012M511393;2013T60610)

摘　　要：利用磁控溅射技术在不同偏压占空比条件下制备类石墨碳（Graphite-like carbon，GLC）薄膜，采用扫描电子显微镜、Raman光谱、X射线光电子能谱、纳米压痕仪等分析薄膜的结构和机械性能，采用球-盘往复摩擦方式考察薄膜在大气及去离子水中的摩擦学性能。结果表明：大气环境中，GLC薄膜的摩擦因数和磨损率随偏压占空比的升高而逐渐降低；水环境中，GLC薄膜的摩擦因数随偏压占空比的逐渐升高先降低后轻微升高，低占空比条件下GLC薄膜在水环境中摩擦接触面出现局部剥落，而高占空比条件下GLC薄膜可表现出低于干摩擦的稳定磨损；当占空比为50％-65％时，GLC薄膜在水环境中的摩擦学性能最佳。Graphite-like carbon （GLC）films were fabricated by magnetron sputtering technology with different bias voltages. The microstructures and mechanical properties were analyzed by scanning electron microscope, Raman spectroscopy, X-ray photoelectron spectroscopy and nano-indenter. The tribological properties in ambient air and distilled water were tested by a reciprocating ball-on-disc tribo-meter. The results show that, in ambient air, both the frictional coefficient and wear rate is decreased with the increase of bias duty cycle. In water, the frictional coefficient is increased at first and then decreased with the increase of bias duty cycle. Delamination on friction contact face of GLC film with low bias duty cycle in water is observed. The stable lower wear of GLC film in water than that in ambient air is achieved when bias duty cycle is increased to the high level. Optimal triboligical properties of GLC film in water can be obtained when the bias duty cycle is 50% - 60%.

关 键 词：GLC薄膜 偏压占空比 摩擦学性能 

分 类 号：TH117.1[机械工程—机械设计及理论]