射频空心阴极等离子体放电气体分布的有限元模拟  

FEM Simulation of Discharge Gas Distribution of Radio Frequency Hollow Cathode Plasma

作　　者：温贻芳[1] 陈闯[2] 芮延年[2] 王红卫 

机构地区：[1]苏州工业职业技术学院,苏州215104 [2]苏州大学,苏州215021 [3]苏州市奥普斯等离子体科技有限公司,苏州215000

出　　处：《机械工程材料》2013年第11期101-106,共6页Materials For Mechanical Engineering

基　　金：科技部2010年科研院所技术开发研究专项资助项目(2010EG111015);2012年江苏省"青蓝工程"中青年学术带头人资助项目

摘　　要：为了得到较为优化的射频空心阴极等离子体放电参数,提高放电气体分布的均匀性,以改善材料表面改性的均匀性,构建了射频空心阴极等离子体放电气体流动的数学模型,应用Fluent软件对放电气体分布进行有限元模拟,得出了较为优化的放电参数;另选择一组放电参数对电池隔膜进行表面改性试验,通过测试电池隔膜的最大吸碱量,得出较优的放电参数。结果表明:试验优选放电参数和模拟所得出的优选放电参数较为吻合,证明了有限元模拟的可行性与实用性;得出的较优放电参数是阳极孔径为8mm,进气流量为5L·min-1,试样距离为20mm。To obtain the optimum parameters of the radio frequency （RF） hollow cathode plasma parameters and develop the uniform of the discharge gas distribution, and then improve the uniform of modified material surface, the mathematical model of discharge gas flow of RF hollow cathode plasma was constructed. Applying the Fluent software to simulate the discharge gas distribution, and obtained the optimum discharge gas parameters. The surface modification experiment of battery separator was tested using the selected parameters, the optimum discharge parameters were obtained by testing the maximum alkali absorption quantity of battery separator. The results show that the discharge parameters obtained by experiment were well with the simulated ones, this could prove that the finite element model simulation was feasible and efficient. The optimum discharge parameters was anode aperture of 8 mm, intake air flow rate of 5 L . min--1 and sample position of 20 mm.

关 键 词：射频空心阴极等离子体 放电气体分布 有限元模拟 

分 类 号：TB21[一般工业技术—工程设计测绘]