基于SOI悬浮波导的中红外热光调制器的分析  

Analysis of mid-infrared thermo-optic modulator based on SOI suspended waveguide

作　　者：檀亚松 余辉[1] 郝寅雷[1] 杨建义[1] 江晓清[1] 

机构地区：[1]浙江大学信息与电子工程学系,浙江杭州310027

出　　处：《激光与红外》2013年第11期1248-1251,共4页Laser & Infrared

基　　金：国家自然科学基金项目(No.61177055);国家重大基础研究发展计划项目(No.2013CB6132105)资助

摘　　要：设计了一种基于SOI(Silicon-On-Insulator)单模中红外低损耗悬浮脊波导的MMI-MZI型热光调制器。对单模悬浮脊波导和基于悬浮波导的调制器的参数进行了分析,并给出了工艺实现方法。在波长5.4μm,采用3D-BPM(Beam Propagation Method)方法对热光调制器的模型进行了传输特性的仿真。结果表明在加热电极长度为3 mm时,热光作用区通过很小的温度变化ΔT=5.3℃时,可以实现消光比为-40 dB。该中红外器件尺寸大,设计和制作容差大,在中红外硅基光子学有着重要的应用。The MMI-MZI thermo-optic modulator based on SOI （Silicon-On-Insulator） single-mode mid-infrared low-loss suspended ridge waveguide is designed and analyzed. Parameters of the single-mode suspended ridge wavegnide and the modulator based on it are analyzed, and the implementation method is given. At the wavelength of 5.4 μm, the transmission characteristics of the thermo-optic modulator model is simulated with 3D-BPM （ Beam Propagation Method） method. The results show that a very small temperature change of 5.3℃ in the thermo-optic area can result in a extinction ratio of-40dB when the heating electrode length is 3 mm. The dimensional tolerance of the MIR device is large ,so it is easy to realize. The design will have important applications in the mid-infrared silicon photonies.

关 键 词：中红外 悬浮波导 热光效应 调制器 集成光学 

分 类 号：TN256[电子电信—物理电子学]