低温热分解对化学法YBa_2Cu_3O_(7-δ)超导薄膜形貌及性能的影响  

EFFECT OF PYROLYSIS PROCESS FOR MORPHOLOGY AND PERFORMANCE OF YBa_2Cu_3O_(7-δ) FILMS

作　　者：郝文嘉[1] 李敏娟[1] 张倩倩[1] 林建新[1] 蔡传兵[1] 

机构地区：[1]上海大学超导及应用技术研究中心,上海200444

出　　处：《低温物理学报》2013年第6期419-424,共6页Low Temperature Physical Letters

摘　　要：金属有机溶液沉积(MOD)法是高温超导钇钡铜氧YBa2Cu3O7-δ(YBCO)薄膜及其涂层导体一种低成本的制备技术.MOD的低温处理可分为有机溶剂蒸发和有机盐分解,其中热平衡及其内应力释放在热解过程中起到重要作用.本文通过对不同热处理条件下的YBCO薄膜表面形貌的观察,获得了热解过程中的应力诱导的表面形貌机制和热参数控制窗口.在此基础上得到了优化的低温热处理条件,从而能有效控制化学法YBCO薄膜表面容易出现的裂纹或隆起现象,最终明确了稳定制备高质量超导薄膜的机制.Metal-organic deposition process （MOD） using trifluroacetates （TFA） has become one of the most promising chemical solution depositions for the fabrication of YBa2Cu3O7-δ（YBCO） superconducting films due to lower cost compared with vacuum deposition methods. The pyrolysis process in MOD can be divided into vapor processes and decomposition process, in which the internal residual stress plays an important role. The windows of key parameter and the mechanism of the surface morphologies which is induced by the residual stress have been studied by means of dynamic observation under several different conditions. And then the pyrolysis process has been optimized which can restrain the formation of the wrinkle and cracks effectively. The mechanism for high quality YBCO films has been obtained.

关 键 词：热解处理 残余应力 金属有机沉积 第二代高温超导材料 

分 类 号：TM26[一般工业技术—材料科学与工程]