用于MOCVD的金属有机Ba源的制备及性质研究  

PREPARATION AND PROPERTIES OF Ba-MO SOURCE FOR MOCVD

作　　者：黎朝仁[1] 张飞[1] 刘鑫[1] 熊杰[1] 陶伯万[1] 赵晓辉[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,成都610054

出　　处：《低温物理学报》2013年第6期430-434,共5页Low Temperature Physical Letters

摘　　要：金属有机化学气相沉积法(MOCVD)能够在长的柔性金属基带上连续、快速、均匀沉积YBa2Cu3O7-δ(YBCO)薄膜,因而极具开发价值.MOCVD制备YBCO涂层导体的关键技术之一在于金属有机源(MO)的制备.国外化学试剂公司在以2,2,6,6-4甲基-3,5庚二酮(thd)为配体的MO源上技术较为成熟,并已实现商业化生产,但是价格昂贵,其中Ba(thd)2价格约为700元/g.另外,与Y(thd)3和Cu(thd)2相比,Ba(thd)2挥发性、稳定性差且制备困难.本文对金属有机Ba源的制备、稳定性及真空下的蒸发特性进行了研究.通过引入助配体四乙烯基戊胺,该Ba源的蒸发温度比纯的Ba(thd)2更低,稳定性更高,且成本仅为30元/g,对于降低YBCO高温超导带材的制备成本具有重要意义.采用该Ba源制备的300nm厚YBCO薄膜的Jc达到2.0MA/cm2(77K,0T),表明其具有很好的实用性.Metal organic chemical vapor deposition （MOCVD） process can realize continuous, rapid, uniform dep- osition of the Second-generation （HTS） tapes of YBa2 Cu3 O7-δ （YBCO） on long flexible metal substrates. The Met- al Organic（MO） source is one of the key issues of preparing the YBCO superconducting films by MCK;VD. MO source has been commercially producted abroad, but it is expensive, such as the price of metal-organic Ba Source is about 700 yuan / g. Compared with Y dipivaloylmethanate （thd）3 and Cu（thd）2, Ba（thd）2 has poor volatility, poor stability and more difficulty in preparation. We reported on the study on the preparation, the stability and the evapo- ration property of Ba-MO source. By introducing the tetraene as subsidiary ligand, our Ba-MO source has lower vol- atilization temperature and greater stability. Its cost is only about ￥30/g, which has great significance for low cost preparation of YBCO HTS tapes. Using the self-made Ba-MO source as the precursor, the Jc of YBCO thin films prepared by MOCVD is up to 2MA/cm2 （77K,0T）, proving the applicability of Ba-MO source.

关 键 词：MOCVD-YBCO涂层导体 金属有机源 助配体 蒸发特性 

分 类 号：TN304.055[电子电信—物理电子学]