Pt表面修饰WO_3纳米线薄膜对高浓度氢气传感性能的研究  

Study on the Sensing Property of Pt Coated WO_3 Nanowire Film for High Concentration of H_2 Gas

作　　者：罗坚义[1,2] 张瑀[1] 陈学贤[2] 李伟达[2] 邓伟源[2] 周洋洋[2] 

机构地区：[1]中山大学物理科学与工程技术学院,广州510275 [2]五邑大学应用物理与材料学院,江门529020

出　　处：《人工晶体学报》2013年第10期2109-2113,2120,共6页Journal of Synthetic Crystals

基　　金：国家自然科学基金(11004153);广东省自然科学基金(S201104000636);广东省优秀青年创新人才培养计划项目(LYM11123);广东省高等学校人才引进专项资金(粤财教[2011]431号)

摘　　要：本文采用热蒸发法合成了高结晶度的WO3纳米线薄膜，并利用溅射法把Pt纳米颗粒催化剂均匀溅射到纳米线的表面，形成Pt表面修饰WO3纳米线的复合纳米网络结构。气敏传感性能测试结果表明，在工作温度为100-140℃，Pt表面修饰的WO3纳米线薄膜对高浓度氢气具有响应度高（电阻变化率接近100％）、响应时间短（小于1．0s）、可重复性好等特点，能够有效地降低传感器的工作温度，解决高浓度探测时的饱和和失效问题，在工业生产中具有潜在的应用价值。WO3 nanowires with high crystalline have been fabricated by thermal evaporation and the Pt nanoparticles are uniformly sputtered onto the surface of each nanowire to form the Pt functionalized WO3 nanowire network. A simple electric circuit is designed to detect the sensing property of Pt coated WO3 nanowire film for high concentration of H2 gas （ near 100% ）. The testing results reveal that the Pt coated WO3 film owns the advantages of great response degree（ i. e. the relative resistance change reaches near 100% ）, short response time （ less than 1.0 s）, and good repeatability for H2 gas sensing at operating temperature of 100-140 ℃. These features can effectively compensate the deficiency of conventional semiconductor sensors, such as high operating temperature and disability for high concentration H2 gas sensing. The results in this work demonstrate the potential application value of Pt coated WO3 nanostructure film in H2 gas sensing and deepen the understanding of H2 gas sensing properties of metal- functionalized nano-materials for high concentration H2.

关 键 词：氢气传感器 WO3 纳米线薄膜 RAMAN光谱 气敏响应 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]