基于数字全息干涉的微振动区域多点同步实时测量  

Real-time micro-vibration multi-spot synchronous measurement within a region based on digital holographic interferometry

作　　者：张兆海[1] 肖文[1] 潘锋[1] 丛琳[1] 张鑫[1] 

机构地区：[1]北京航空航天大学仪器科学与光电工程学院,北京100191

出　　处：《光电子．激光》2013年第11期2174-2179,共6页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金(61177006)资助项目

摘　　要：为满足工程应用中对物体微振动进行区域多点同 步实时测量的需求,基于数字 全息干涉理论提出一种微振动区 域多点同步实时测量方法,构建了一套微振动多点同步测量系统。通过对高速采集的全息图 进行局部解算,采用快速振幅解算 算法,从全息图中实时提取振动表面的振动信息,实现了在较高频率下对物体表面进行nm 量级的微振动区域多点实时测量。 通过测量经高精度多普勒振动测量仪校准后的耳机振膜振动情况,对系统进行了实验验证 。实验结果表明,系统能够实时获取 物体表面的微振动信息,可同时提取任意点进行同步实时振动测量,在100～2400Hz频段内测量精度较高,平均误差为3.7%,测量区域内各点测量精度相同。Real-time micro-vibration measurement is widely used in engineering applications.It is very difficult for traditional optical detection methods to achieve real-time need in a relatively high frequency and multi-spot synchronous measurement of a region at the same time,especially at the nanoscale.Based on digital holographic interferometry t heories,a method of real-time micro-vibration multi-spot synchronous measurement of a region is proposed to satisfy the demand in enginee ring applications.A corresponding measuring system is built according to this approach.The high speed acquired holograms are localy c a lculated.Vibration information of the region can be extracted directly and instantaneously from the holograms by using a fast demodulation alg orithm.By this way,the measuring range is enlarged remarkably.The proposed method can achieve real-time need in a relatively high frequency and multi-spot synchronous measurement of a region at the same time.The feasibility of the system is demonstrated by measur ing the vibration of a headset diaphragm calibrated by the high precision Doppler vibration measuring instrument.The results demonstrate that t he system is feasible,when the frequency range of the vibration is between 100Hz and 2400Hz.The measurement error is 3.7% on average and every point in the measurement region has the same accuracy.

关 键 词：数字全息 实时 微振动测量 区域多点测量 频率响应 测量精度 

分 类 号：TH741[机械工程—光学工程]