基于原子力显微镜的金刚石刀具锋利度检测装置研制  

Developing the measuring equipment for blade sharpness of diamond tools based on AFM

作　　者：张晓峰[1] 王宝瑞[1] 杜文浩[1] 刘兴宝[1] 

机构地区：[1]中国工程物理研究院机械制造工艺研究所,绵阳621900

出　　处：《现代制造工程》2013年第11期106-109,140,共5页Modern Manufacturing Engineering

摘　　要：有效评价圆弧刃金刚石刀具锋利度的关键是如何准确获取刃口形貌信息,基于此建立了以原子力显微镜(Atomic Force Microscopy,AFM)和精密气浮主轴为核心部件的测量系统。为了评价系统的测量可靠性,对气浮主轴的回转误差进行了测试;对安装回转轴系后的AFM噪声和定位精度进行了测试,结果表明系统的静态噪声值约为5nm,主轴具有较高的定位精度。最后应用测量系统进行了圆弧刃金刚石刀具全刃口锋利度测量实验,首次从整体轮廓上对圆弧刃金刚石刀具的锋利度作出了评价,具有一定的实际意义,为金刚石刀具质量评价提供了参考。The key to effective evaluate arc sharpness of diamond tool is how to obtain edge information accurately, so the measuring system whose core components are atomic force microscopy and precision gas flotation spindle is established on the basis of this. In order to evaluate the measurement of the system reliability, the gas floating spindle rotary error were tested; after that the installation of rotary shaft noise and the accuracy of atomic force microscope have been tested, and resuhs indicate that the system static noise value of about five nanometers and the spindle has a high positioning accuracy. Finally, applied measuring system to measure all edge sharpness of the circular diamond tool. This is the first time that making evaluation from the whole contour on arc edge sharpness of the diamond tool, and this has a certain practical significance which will provide reference for evaluating diamond quality.

关 键 词：全刃口锋利度 空气轴承 原子力显微镜 

分 类 号：TG806[金属学及工艺—公差测量技术]