AFM中高精度信号采集模块设计  

Design of High-Precision Signal Acquisition module in AFM

作　　者：赵鑫斌 李龙海[1,2] 周磊[1] 王栋[1,2] 董再励[1] 

机构地区：[1]中国科学院沈阳自动化研究所,沈阳110016 [2]中国科学院大学,北京100049

出　　处：《计算机测量与控制》2013年第10期2875-2877,2894,共4页Computer Measurement &Control

基　　金：国家高技术研究发展计划(2012AA041024)

摘　　要：实现高分辨率原子力显微镜(AFM)扫描成像需要高精度的信号采集,针对这个问题,设计了一款基于FPGA和ADS1610的高精度信号采集模块,研究中运用信号完整性理论对模块电路噪声进行了分析与仿真,并通过采取阻抗匹配、电容滤波等方法有效抑制了噪声;实际测试结果显示:最小精度可达0.2mV,满足设计需要,对实现高分辨AFM成像有重要意义。The high--resolution atomic force microscope （AFM） imaging needs high--precision signal acquisition. In order to solve this problem, a high--precision signal acquisition module based on FPGA and ADS1610 was designed. The noise in the module was analyzed and simulated by the theory of signal integrity, and restrained by adopting the methods such as impedance matching and capacitor filtering. The actual testing results show that the minimum accuracy of the module can reach 0.2mV which fills the needs of the design, and the module has important significance for high--resolution AFM imaging.

关 键 词：AFM FPGA 高精度信号采集 信号完整性 

分 类 号：TH274[机械工程—机械制造及自动化]