B靶功率对ZrBN复合膜的微结构、力学性能及摩擦性能的影响  

Effect of B target power on microstructure, mechanical properties and friction properties of ZrBN composite films

作　　者：喻利花[1] 赵强[1] 马冰洋[1] 许俊华[1] 

机构地区：[1]江苏科技大学材料科学与工程学院,镇江212003

出　　处：《粉末冶金材料科学与工程》2013年第5期748-753,共6页Materials Science and Engineering of Powder Metallurgy

基　　金：国家自然科学基金资助项目(51074080);江苏省自然科学基金资助项目(BK2008240)

摘　　要：采用磁控溅射法,以不同的B靶功率(分别为24,30,60,90和120 W),在单晶硅(100)和不锈钢基底上制备一系列不同B含量的ZrBN复合膜,利用扫描电镜、能谱仪、X射线衍射仪、纳米压痕仪(CSM)和摩擦磨损试验机研究B靶功率对ZrBN复合膜的微结构、力学性能、以及室温和高温摩擦性能的影响。结果表明:当B靶功率低于30 W时,复合膜呈fcc ZrBN结构;当B靶功率高于30 W时,复合膜为fcc ZrBN和hcp ZrB2双相结构。当B靶功率为24 W时,复合膜的硬度和室温摩擦因数分别为29.3 GPa和0.75,随B靶功率增大,硬度和室温摩擦因数都逐渐减小。B靶功率为24 W时制备的ZrBN复合膜的摩擦因数随温度升高先减小后增大。同时,对ZrBN复合膜的摩擦机理进行探讨。ZrBN composite films with different B contents were prepared on wafers of silicon （100） and stainless steel by reactive magnetron sputtering technique with same Zr target power and different B target powers （ 24, 30, 60, 90 and 120 W）. The microstructures, mechanical properties and friction properties at different test temperatures were investigated by SEM-EDS analysis, X-ray diffraction, nano-indentation CSM and high-temperature ball-on-disc tribo-meter. The results show that, the coatings exhibit fcc ZrBN structure when the power orb target is below 30 W, when the power of B target is above 30 W the films show a two phase structure comprising fcc ZrBN phase and hcp ZrB2 phase. When the power of B target is 24 W, the hardness and friction coefficient of composite films is 29.3 GPa and 0.75, respectively. The hardness and friction coefficient gradually decreases with increasing B target power. The friction coefficient of ZrBN composite films with B target power of 24 W decreases and then increases with increasing temperature. Tribological mechanism of ZrBN composite films is also discussed.

关 键 词：ZrBN复合膜 微结构 力学性能 摩擦性能 

分 类 号：TG174.44[金属学及工艺—金属表面处理]