图纹结构Co/Pt多层膜的制备及研究  

Preparation and Research on Co /Pt Multi-layer Film with Graphic Structure

作　　者：李佳[1] 张永军[1] 范厚刚[1] 

机构地区：[1]吉林师范大学功能材料物理与化学教育部重点实验室,吉林四平136000

出　　处：《吉林师范大学学报（自然科学版）》2013年第4期71-74,共4页Journal of Jilin Normal University:Natural Science Edition

基　　金：新世纪优秀人才支持计划项目(NCET-11-0981);吉林省科技发展计划项目(20120359)

摘　　要：先采用自组装技术制备大面积有序聚苯乙烯微球模板,在此基础上,制备Co/Pt多层膜纳米碗和纳米点列阵样品.利用扫描电子显微镜(SEM)、原子力显微镜(AFM)和透射电子显微镜(TEM)对制备样品的表面形貌进行了分析.结果表明:溅射方法和刻蚀处理对纳米碗和纳米点的形貌存在影响,磁滞回线的结果表明倾斜溅射条件下制备的纳米点阵具有明显的方向取向性.The paper analyses the surface morphology of nano bowl arrays and nano dot arrays on the multi-layer Co/Pt membrane that was previously prepared on a large template of polystyrene microspheres by self-assembly technology. The purpose of the analysis is to study the influences that different conditions and etching process have on the morphology of the arrays of nano bowls and dots.. And the result shows：sputtering and etching can affect the morphology of nano bowl arrays and nano dot arrays. And the nano bowl arrays prepared by sputtering face toward a clear direction.

关 键 词：磁记录材料 CO Pt多层膜 自组装 纳米碗 纳米点 

分 类 号：O484.5[理学—固体物理]