石英脱羟真空炉的机械设计研究  

Mechanical design of the vacuum furnace for hydroxyl removing of quartz

作　　者：徐英锋[1] 谢晶[2] 杨卫平[2] 

机构地区：[1]青岛港湾职业技术学院机械工程系,山东青岛266404 [2]北京七星华创电子股份有限公司,北京100016

出　　处：《真空》2013年第6期57-59,共3页Vacuum

摘　　要：石英真空脱羟炉是金卤灯用石英玻璃脱羟工艺的关键设备。分析了石英脱羟炉的核心部件加热器、隔热屏的设计思路,根据计算功率进行了加热器的设计计算和校核;阐述了抽真空系统和快速冷却系统的设计思路等。结合现代CAD技术,进行三维建模,可以大大提高设计效率和保证设计一次成功率,通过实践检验,能够达到设计的各项指标,完全可以满足石英玻璃脱羟工艺的要求。The vacuum furnace is the key equipment for hydroxyl removing of quartz glass which is used for metal halide lamps. The key heater and heat shield were analyzed and the heater was designed and checked according to the calculated power. The design ideas of vacuum system and rapid cooling system were set forth. 3D modeling combined with CAD can increase design efficiency and assure the first success. The furnace can fully meet the design and process requirements for hydroxyl removing of quartz through practice.

关 键 词：石英真空脱羟炉 三维建模 加热器设计 

分 类 号：TB751[一般工业技术—真空技术] TH122[机械工程—机械设计及理论]