声激励共振法测量微机械材料的杨氏模量  

Acoustically-excited method for Young's modulus measurement of micro-machined materials

作　　者：顾利忠[1] 左铭旺[1] 苏菲[1] 

机构地区：[1]清华大学自动化系,北京100084

出　　处：《声学技术》2000年第4期187-189,共3页Technical Acoustics

基　　金：国家自然科学基金资助项目!(批准号 :6 9885 0 0 5 )

摘　　要：微机械材料的杨氏模量测量是随着微机械构件的产生而提出的一项新技术。文章综述了已有的测量微机械材料杨氏模量的方法。提出了用声激励共振法来测量微机械材料的杨氏模量。这种方法具有测试装置简单、测量容易、精度高等特点。Young's modulus measurement of micro machined materials is a new technique proposed with the appearance of the micro machined parts. This article summarized the published methods for Young's modulus measurement of the micro machined materials, and proposed an acoustically excited method for measurement of the micro machined materials. This method has some features such as testing devices simple, easy operation and high accuracy.

关 键 词：杨氏模量 声激励 微机械材料 声激励共振法 

分 类 号：TH14[一般工业技术—材料科学与工程]