表面高分辨弹性反冲探测分析  

High Resolution Surface Analysis with Elastic Recoil Detection

作　　者：路秀琴[1] 符长波[1] 郭继宇[1] 赵葵[1] 梁刚[1] 李淑媛[1] 刘建成[1] 姜华[1] 

机构地区：[1]中国原子能科学研究院核物理所,北京102413

出　　处：《原子核物理评论》2000年第4期228-230,共3页Nuclear Physics Review

基　　金：国家自然科学基金资助项目(19775067);核工业科学基金资助项目(H7196A0113)

摘　　要：在中国原子能科学研究院 HI- 1 3串列加速器上建立了用 Q3D磁谱仪动量分析和ΔE- E粒子分辨对材料表面进行高分辨的弹性反冲探测分析技术 .用 1 0 0 Me V12 7I对 C/Li F多层样品的深度分布分析表明 ,表面分辨达到 1 .2 nm.所建立的ΔE(气体 ) - E(半导体 )望远镜探测器可同时分析从轻至中重的所有元素 .实测了新光电材料 Ga N,La2 Sr Cu O4 超导膜和新超硬材料 C3N4 (Si)等样品 .High resolution depth profiling technique with elastic recoil detection analysis has been developed at the HI 13 tandem accelerator of CIAE. A depth resolution of 1.2 nm was achieved at the surface of the samples with the Q3D magnetic spectrometer and the focal plane detector. From light to medium heavy elements were simultaneous analyzed with a small Δ E E telescope. The method was applied to depth profile analysis of C/LiF multilayers, La 2SrCuO 4 superconductor and GaN foil samples.

关 键 词：弹性反冲探测 深度分辨 Q3D谱仪 

分 类 号：TL81[核科学技术—核技术及应用]