纯钛表面制备钛酸钡薄膜的技术参数研究  

Technical Parameters of Preparation of Titanate Thin Films on Titanium Surface

作　　者：王慧[1] 吴文慧[1] 岳奇[1] 陈浩哲[1] 杨红光[1] 

机构地区：[1]河北联合大学口腔医学院,唐山063000

出　　处：《表面技术》2013年第6期69-72,共4页Surface Technology

摘　　要：目的探讨在纯钛基片上制备钛酸钡薄膜的技术参数,为增强钛瓷结合强度奠定研究基础。方法以碳酸钡和钛酸丁酯为原料,利用溶胶-凝胶法在纯钛基片上制备钛酸钡薄膜,对比不同浓度溶胶、不同干燥机制条件下制备的薄膜的质量。结果 180℃干燥、380℃热处理、升温速率6℃/min和120℃干燥、300℃热处理、升温速率3℃/min两种条件相比,前一种条件制备的薄膜退火后开裂程度大。采用0.3 mol/L钛酸钡溶胶,在后一种条件下制备的薄膜基本完好,无裂纹;而采用0.35 mol/L钛酸钡溶胶,在相同条件下制备的薄膜裂纹较明显。结论采用0.3 mol/L钛酸钡溶胶,在120℃干燥、300℃热处理、升温速率3℃/min的条件下制备薄膜,薄膜质量最佳。Objective To investigate the technical parameters of barium titanate thin films prepared on titanium substrate, and to lay research base for the enhancement of the bonding strength of titanium porcelain. Methods U- sing barium carbonate and butyl titanate as raw materials, the sol-gel method was applied to prepare barium titanate films on titanium substrates, and then the quality of films prepared under different concentrations of sol and different drying mechanisms was compared. Results Comparing the two conditions： 1 ） 180 ~C drying, 380 ~C heat treatment with a heating rate of 6 ~C/min, and 2） drying at 120 ~C, 300 ~C heat treatment with a heating rate of 3 ~C/min, the film prepared under the former condition showed large degree of cracking after annealing. Using 0.3 mol/L barium ti- tanate sol, the film prepared under the latter condition was basically intact, without cracks, while when 0.35 mol/L barium titanate sol was used, the film prepared under the same conditions showed obvious cracking. Conclusion The optimal conditions for preparing high-quality films were： 0.3 mol/L barium titanate sol, dried at 120 ℃, 300 ℃ heat treatment with a heating rate 3℃/min.

关 键 词：纯钛基片 钛酸钡薄膜 溶胶-凝胶法 制备参数 

分 类 号：TG174.45[金属学及工艺—金属表面处理]