ZrO_2掺杂对钡硼硅系微晶玻璃性能的影响  

Effect of ZrO_2 Doping on Properties of BaO–B_2O_3–SiO_2 Glass-ceramics

作　　者：唐波[1] 李波[1] 

机构地区：[1]电子科技大学,电子薄膜与集成器件国家重点实验室,成都610054

出　　处：《硅酸盐学报》2013年第12期1650-1655,共6页Journal of The Chinese Ceramic Society

基　　金：国防基础科研计划(A1420110097);中央高校基本科研业务费专项资金(ZYGX2011J025)资助项目

摘　　要：采用固相法制备具有高热膨胀系数的BaO–B2O3–SiO2系微晶玻璃。通过对微晶玻璃复合材料的热、力和电学性能以及扫描电子显微镜、X射线衍射和差热分析,研究了ZrO2掺杂对钡硼硅系微晶玻璃各项性能的影响。结果表明:随ZrO2掺杂含量的增加,微观上微晶玻璃中方石英晶相含量明显减少,石英晶相含量显著增加;宏观上,微晶玻璃的抗弯强度及其相对介电常数逐渐增加,热膨胀系数随之略微减小,但可在一定范围内通过调整微晶玻璃高的热膨胀系数,使热膨胀系数随温度的变化更趋于线性化,优化微晶玻璃的热学性能。在950℃烧结温度条件下,ZrO2掺杂量为5%(质量分数)时得到的微晶玻璃抗弯强度最大(181 MPa),具有较高的热膨胀系数(14.21×10–6/℃),较低的相对介电常数(6.4)及介电损耗(0.4%),可以满足微晶玻璃低温共烧陶瓷(LTCC)封装材料要求。BaO-B2O3 SiO2 glass-ceramic with high thermal expansion behavior were prepared by a solid-state method. Thermal, mechanic, electric properties of glass-ceramic composite materials and its scanning electron microscope, X-ray diffractometer and differential scanning calorimetry were used to research the effect of ZrO2 doping on the properties of BaO-B203-SiO2 glass-ceramic. The results show that as the ZrO2 doped content increases, microscopic, the cristobalite phase of glass-ceramic content reduced significantly, the quartz crystal phase content increased significantly; macroscopic, the bending strength and the relative permittivity of the glass-ceramic gradually increase, the thermal expansion coefficient gradually decrease slightly, the high thermal expansion coefficient can be adjusted by doping ZrO2, the thermal expansion coefficient changes with temperature tend to be more linear, optimized the thermal properties of glass-ceramic. When sintering temperature is 950℃, ZrO2 doped content is 5%, BaO-B2O3-SiO2 glass ceramics were obtained with maximum bending strength （181 MPa）, higher CTE （14.21℃ 10^-6/℃）, lower relative dielectric constant （6.4） and lower dielectric loss （0.4%）. This glass ceramics can meet the requirement of glass ceramics low temperature co-fired ceramics package materials.

关 键 词：钡硼硅 方石英 石英 热膨胀系数 抗弯强度 相对介电常数 

分 类 号：TQ174[化学工程—陶瓷工业]