二氧化钒纳米孔洞薄膜的光学特性  

Optical Properties of Vanadium Dioxide Film with Nano-holes

作　　者：梁倩[1] 李毅[1,2] 方宝英[1] 严梦[1] 王锋[1] 覃源[1] 丁杰[1] 佟国香[1] 王晓华[1,3] 陈少娟[1] 陈建坤[1] 郑鸿柱[1] 袁文瑞[1] 

机构地区：[1]上海理工大学,上海200093 [2]上海市现代光学系统重点实验室,上海200093 [3]上海电力学院,上海200090

出　　处：《硅酸盐学报》2013年第12期1685-1691,共7页Journal of The Chinese Ceramic Society

基　　金：国家"863"计划项目(2006AA03Z348);教育部科学技术研究重点项目(207033);上海市科学技术委员会科技攻关计划项目(06DZ11415);上海市教育委员会科技创新重点项目(10ZZ94);区域光纤通信网与新型光通信系统国家重点实验室开放基金;上海领军人才培养计划资助项目

摘　　要：为了进一步改善二氧化钒(VO2)薄膜的光学特性,基于有效介质近似理论和VO2在不同温度和波长下的折射率和消光系数,建立了研究VO2纳米周期孔洞薄膜光学特性的数学模型。采用磁控溅射和氧化退火方法,先在石英衬底上制备VO2薄膜,再经多孔氧化铝掩膜和离子束刻蚀工艺,制备了VO2纳米孔洞薄膜。结果表明,随着孔隙率的增加,反射率最低点向短波长移动。与在石英衬底上制备的VO2薄膜相比,VO2纳米孔洞薄膜的透过率明显优于VO2薄膜,在红外区域透过率提高了20%,具有较好的热致变色特性和应用潜力。To improve the optical properties of vanadium dioxide （VO2） film, a mathematical model describing the optical properties of VO2 film with nano-periodic holes was proposed based on the effective medium approximation theory. The VO2 films were deposited on quartz substrates via magnetron sputtering and oxidation annealing. The VO2 films with nano-holes were fabricated by ion beam etching with the mask of porous alumina. The theoretical analysis and experimental results show that the minimum value of the reflectance moves toward a shorter wavelength when the porosity increases. The transmittance of the VO2 film with nano-holes is better than that of the VO2 film deposited on quartz substrate. The transmittance is increased by 20% in the infrared region. The VO2 film with nano-holes has better thermochromic properties for some potential applications.

关 键 词：二氧化钒 薄膜 孔洞 有效介质理论 透过率 

分 类 号：TB43[一般工业技术] TN213[电子电信—物理电子学]