充油式高温高压温度压力复合传感器  

Oil-Filled High-Temperature and High-Pressure Composite Sensors of Pressure and Temperature

作　　者：田雷[1] 刘智辉[1] 李海博[1] 尹延召 

机构地区：[1]中国电子科技集团公司第四十九研究所,哈尔滨150001

出　　处：《微纳电子技术》2013年第12期776-780,共5页Micronanoelectronic Technology

摘　　要：将铂膜温度芯片和SOI压力芯片近距离装配在充油芯体内，进行真空充油后，温度和压力传感器芯片同时被硅油保护起来，再通过波纹膜膜片感受压力。由于温度芯片和压力芯片距离非常近，可以同时感受较小局部区域的温度信号和压力信号，解决了同时测量同一区域压力和温度信号的技术难题，同时对压力传感的温度补偿具有很好的效果。对所研制的充油式温度压力复合传感器进行了性能测试，结果表明，测试结果与设计相符，其中温度传感器的允差为A级，压力传感器的非线性优于0．2％FS，压力测量范围为0～75MPa，工作温度范围为-50～175℃。The Pt-film temperature chip and SOI pressure chip were packed in an oil-filled tube socket. The temperature chip and pressure chip were protected by the silicone oil after the tube socket was oil-filled in vacuum environment. And the sensor senses the pressure by the corruga- ted diaphragm. The two chips are near enough to sense the temperature and pressure signals in a small local area synchronously, which solves the problem of the measurement of the temperature and pressure signals in the same area at the same time, and it is good for the temperature compen- sation of the pressure sensor. The performance tests for the oil-filled composite sensor of the temperature and pressure were carried out. And the result shows that the sensor works as it was designed. The tolerance of the temperature sensor is grade A, the non-linearity of the pressure sensor is less than 0.2~FS, the pressure sensor range is of 0 - 75 MPa, and the operating tem- perature range is from -50 ℃ to 175 ℃.

关 键 词：复合传感器 温度 压力 充油 温度补偿 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]