二维亚波长金属光栅多波长透射滤光片  

Transmission Bandpass Filters Based on Two-Dimensional Subwavelength Metallic Gratings

作　　者：周文超[1,2] 吴一辉[1] 郝鹏[1] 刘桂根[1] 李凯伟[1,2] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《光学学报》2013年第11期25-30,共6页Acta Optica Sinica

基　　金：国家863计划(2012AA040503);国家自然科学基金重点项目(11034007);国家杰出青年基金(61102023);吉林省科技发展计划项目(20120329)

摘　　要：为实现阵列化、多波长光探测器件的微型化与集成化，设计了一种基于亚波长金属光栅导模共振原理的透射滤光片。利用波导理论分析了二维金属光栅波导对称和非对称两种结构的共振特性，数值仿真分析了光栅各参数如占空比、光栅厚度、侧壁角度等对透射谱线的影响，并给出了结构优化参数范围。研究表明，透射滤光片的峰值波长与半峰全宽（带宽）取决于光栅周期和缓冲层厚度，带宽的调节范围为2~45 nm，最大透射率为81.7%，所设计的滤光片具有偏振无关性，较好地满足了当前微流控芯片、生物传感阵列等微量样品集成化探测的需求。In order to achieve the miniature and integration of the optical devices in multi-wavelength array detection, a novel transmission filter based on subwavelength metallic grating guided mode resonance is proposed. The resonance characteristics of the filters with symmetric and nonsymmetric waveguide structure are theoretically analyzed. The effects of the grating structural parameters on the transmission spectrum are investigated in detail, such as filling factor, grating thickness, the sidewall angle, et al. And the optimal scope of the grating structure is also presented. Simulation results show that the peak position and the full width at half maximum （FWHM） of the filter are attributed to the grating period and the buffer layer. And the FWHM can be adjusted from 2 nm to 45 nm, the maximum transmittance increases to 81.7%. Besides, the transmission spectrum is independent on the polarization of the incident field due to the symmetry of the subwavelength metallic grating. The filters can satisfy the requirements of microfluidic and biosensing and so on.

关 键 词：光栅 导模共振 透射滤光片 带宽 

分 类 号：O436.1[机械工程—光学工程]