A readout system for passive pressure sensors  

作　　者：张会新 洪应平 葛冰儿 梁庭 熊继军 

机构地区：[1]Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China),Ministry of Education [2]Ministry of Education and Science Technology on Electronic Test & Measurement Laboratory,Department of Electronic Science and Technology,North University of China

出　　处：《Journal of Semiconductors》2013年第12期91-96,共6页半导体学报（英文版）

基　　金：Project supported by the National Basic Research Program of China(No.2010CB334703);the National Natural Science Foundation of China(No.51075375)

摘　　要：This paper presents a readout system for the passive pressure sensors which consist of a pressure- sensitive capacitor and an inductance coil to form an LC circuit. The LC circuit transforms the pressure variation into the LC resonant frequency shift. The proposed system is composed of a reader antenna inductively coupled to the sensor inductor, a measurement circuit, and a PC post-processing unit. The measurement circuit generates a DC output voltage related to the sensor＇s resonant frequency and converts the output voltage into digital form. The PC post-processing unit processes the digital data and calculates the sensor＇s resonant frequency. To test the performance of the readout system, a sensor is designed and fabricated based on low temperature co-fired ceramic （LTCC）, and a series of testing experiments is carried out. The experimental results show good agreement with the impedance analyzer＇s results, their error is less than 2.5%, and the measured values are almost insensitive to the variation of readout distance. It proves that the proposed system is effective practically.This paper presents a readout system for the passive pressure sensors which consist of a pressure- sensitive capacitor and an inductance coil to form an LC circuit. The LC circuit transforms the pressure variation into the LC resonant frequency shift. The proposed system is composed of a reader antenna inductively coupled to the sensor inductor, a measurement circuit, and a PC post-processing unit. The measurement circuit generates a DC output voltage related to the sensor＇s resonant frequency and converts the output voltage into digital form. The PC post-processing unit processes the digital data and calculates the sensor＇s resonant frequency. To test the performance of the readout system, a sensor is designed and fabricated based on low temperature co-fired ceramic （LTCC）, and a series of testing experiments is carried out. The experimental results show good agreement with the impedance analyzer＇s results, their error is less than 2.5%, and the measured values are almost insensitive to the variation of readout distance. It proves that the proposed system is effective practically.

关 键 词：passive pressure sensor LC resonant circuit resonant frequency inductive coupling WIRELESS 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]