Laser wavelength effects on(Ti,Al,Si)N in near-field laser nanostructuring by micron optical fiber enhanced irradiation  

作　　者：LIU DaMeng LIU JiaChen WANG Hui SU Kang SHAO TianMin 

机构地区：[1]State Key Laboratory of Tribology, Tsinghua University

出　　处：《Science China(Technological Sciences)》2013年第12期3012-3016,共5页中国科学（技术科学英文版）

基　　金：supported by the National Natural Science Foundation of China(Grant Nos.90923018,51105222)

摘　　要：The effects of laser wavelengths(1064,532,355 and 266 nm)on nano-processing of fabricating a groove structure on(Ti,Al,Si)N alloy film using the micro-fiber near-field enhanced irradiation are investigated.It is observed that variations of laser wavelength can effectively change the widths of the groove structures,which are featured as one-dimension bowl-like structures.The minimum of the groove width can be achieved at 293 nm with a 532 nm laser inducing.In order to fabricate the groove in nanoscale,enough energy is delivered onto(Ti,Al,Si)N surface by a single laser pulse.Simulation results are also discussed to understand the experimental results.

关 键 词：micro-fiber field enhancement NANO-OPTICS NANOSTRUCTURING 

分 类 号：TG174.4[金属学及工艺—金属表面处理]