应用6σ优化薄膜制造过程能力  

Application of 6σ to Optimize Thin Film Manufacturing Process

作　　者：秦跃利[1] 王春富[1] 项博[1] 

机构地区：[1]中国西南电子设备研究所,四川成都610036

出　　处：《电子工艺技术》2013年第6期363-366,共4页Electronics Process Technology

摘　　要：电子装备生产的日益规模化对科学性的控制管理方法要求越来越高。提出将统计学应用于生产制造中,并实践应用统计方法,对薄膜制造中的集成电阻精度、图形转移精度和基片外形破碎率等项内容进行了过程能力的分析评价。根据分析结果制定和实施了优化方案,取得了满意效果。With the rapid development of electronic device, the scientifc control method is Put forward. Use statistics to analyze thin flm manufacture process is available. The process such as resistor precision control, graphics precision, and substrate break ratio were analyzed by SPC. According to the analysis results, the optimization plan was set out and carried out,and the satisfactory results were obtained.

关 键 词：6σ 薄膜 过程控制 过程能力 

分 类 号：TN44[电子电信—微电子学与固体电子学]