差分激光三角法油膜厚度测量传感器的测量范围与精度分析  

Analysis on Measurement Range and Precision of the Oil Film Thickness Measurement Sensor Based on Differential Laser Trigonometry

作　　者：吴頔[1,2] 吕且妮[1,2] 陈曦[3] 葛宝臻[1,2] 

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]光电信息技术教育部重点实验室,天津300072 [3]天津大学电气与自动化工程学院,天津300072

出　　处：《天津大学学报（自然科学与工程技术版）》2013年第11期998-1002,共5页Journal of Tianjin University：Science and Technology

基　　金：国家高技术研究发展计划(863计划)资助项目(2008AA09Z115);国家自然科学基金资助项目(40876050)

摘　　要：针对所研制的海面溢油油膜厚度测量传感器的测量范围和精度进行了研究.在分析基于垂直入射差分激光三角法油膜厚度测量原理的基础上,分别采用厚度0.1,mm的塞尺和10,mm的陶瓷量块对传感器的测量上下限进行了验证,并采用厚度为1~10,mm的0级陶瓷量块对传感器进行了精度测量和分析.结果表明,所研制的油膜厚度测量传感器的范围为0.1~10,mm,测量相对误差小于1%.The range and precision of the measurement of the newly-developed sea oil film thickness measurement sensor was studied. Based on analyzing the principle of oil film thickness method with vertical incidence differential laser trigonometry,the measureable thickness range was obtained using 0.1,mm feeler gauge and 10,mm ceramic block gauge,and the measurement precision was obtained using 1~10,mm block gauges. The experiments results show that the measurement range of oil film thickness measurement sensor is 0.1~10,mm,and the relative error is less than 1%.

关 键 词：激光三角法 垂直入射 油膜厚度 测量范围 精度 

分 类 号：TH741[机械工程—光学工程]