光栅测长机热误差修正温度测量系统研制  

Development of temperature measurement system for thermal error correction of grating length measuring machine

作　　者：孙向荣[1] 吴志凌 曾正[1] 

机构地区：[1]贵州民族大学计算机与信息工程学院,贵州贵阳550025 [2]贵阳新天光电科技有限公司,贵州贵阳550018

出　　处：《合肥工业大学学报（自然科学版）》2013年第11期1300-1303,共4页Journal of Hefei University of Technology：Natural Science

基　　金：贵州省自然科学基金资助项目(2008-2501);贵州省教育厅自然科学基金资助项目(2008-047)

摘　　要：文章利用石英温度传感器设计制作了一套多路温度测量仪,满足了光栅测长机的测温需求,使光栅测长机的测量精度获得提高,并将手动目视测量改为自动测量。由于从温度采集到显示的整个过程都采用数字量传输,避免了信号检测及传递过程中因电源波动、寄生热电偶、传感器自热带来的误差,使系统具有较高的精度及较强的抗干扰能力。实验和检定结果表明温度测量系统的测量不确定度不大于±0.1℃,满足使用要求。A multi-channel temperature measuring instrument is designed and produced using quartz temperature sensors. It meets the temperature measurement need of grating length measuring machine with higher measurement accuracy and changes the manual visual measurement to automatic measure-ment. For the use of digital values in the whole process from the temperature data collection to dis-play, the errors formed in the signal detection and transfer process owing to power fluctuations, para-sitic thermocouples and self-heating effect of sensor are avoided successfully, which makes the system have high accuracy and strong capacity of resisting disturbance. The experiment and the test results show that the uncertainty of measurement of the temperature measurement system is not more than ±0.1℃ ,which satisfies the requirement of utilization.

关 键 词：光栅测长机 热误差 石英温度传感器 测量系统 精度 

分 类 号：TP274.5[自动化与计算机技术—检测技术与自动化装置]