涡轮分子泵轴系结构的临界转速计算分析  

The Calculation and Analysis of the Critical Whirling Speed of the Shaft Structure of the Turbo Molecular Pump

作　　者：刘雨[1] 罗阳[1] 程序雳[1] 

机构地区：[1]四川大学制造科学与工程学院,四川成都610065

出　　处：《装备制造技术》2013年第11期14-16,20,共4页Equipment Manufacturing Technology

摘　　要：由于涡轮分子泵是高速旋转,所以对于涡轮分子泵轴系结构的临界转速计算就显得格外重要。论述了用传递矩阵法计算涡轮分子泵轴系结构临界转速的方法,同时运用有限元软件Solidworks Simulation来验证传递矩阵法的计算结果。由于所研究的涡轮分子泵最高转速约27 000 rpm,换算为频率为450 Hz,所以后3种模式频率值都远超出了涡轮分子泵的工作范围。传递矩阵法是计算轴系结构临界转速的经典方法之一,而采用有限元软件来计算相对则更加简便、精确。Because the turbine molecular pump rotates at high speed, it is important to account its critical whirling speed of the shaft structure. The thesis discusses the accounting method by the transfer matrix method and test the accounting result by using finite element software-the Solidworks Simulation.Resuhs： because of the high speed turbo molecular pump research about 27 000 RPM, conveying a frequency of 450 Hz, so after three kinds of mode frequency values are far beyond the work scope of turbo molecular pump. Conclusion： the transfer matrix method is calculating shafting structure is one of the classic methods of critical speed, and the finite element software to calculate the relative is more simple and accurate.

关 键 词：临界转速 轴系结构 传递矩阵法 有限元法 

分 类 号：TB752[一般工业技术—真空技术]