挡板尺寸对电弧离子镀TiAlN涂层微观结构和摩擦学性能的影响  

Effect of Shielded Plate Size on the Microstructure and Tribological Properties of TiAlN Coating Prepared by Arc Ion Plating

作　　者：冯长杰[1] 胡水莲[1] 江鸢飞[1] 胡弦[1] 

机构地区：[1]南昌航空大学材料学院,江西南昌330063

出　　处：《摩擦学学报》2013年第6期606-613,共8页Tribology

基　　金：国家自然科学基金(51005111);江西省创新基金(YC2011-S102)项目资助~~

摘　　要：利用电弧离子镀技术,采用Ti50Al50合金靶,在304不锈钢基体上沉积TiAlN涂层.在Ti50Al5合金靶和基体挂架中间设置直径分别为80、100和120 mm圆形挡板,并与无挡板沉积的TiAlN涂层对比,采用SEM/EDS、XRD研究挡板尺寸对涂层微观结构、成分的影响,通过显微硬度计、划痕仪和摩擦磨损试验研究挡板尺寸对TiAlN涂层力学性能及摩擦学性能的影响.结果表明:随着挡板尺寸增大,TiAlN涂层中Ti含量逐渐降低,Al含量逐渐升高,涂层表面熔滴数量显著减少,沉积速率降低.增大挡板尺寸后,涂层硬度下降,膜基结合力减小.添加挡板后TiAlN涂层表面凹坑缺陷增多,摩擦系数增大,与无挡板的TiAlN涂层相比,耐磨性显著提高.TiA1N coatings were deposited on 304 stainless steel using Ti50A150 alloy target by arc ion plating. Three kinds of rounded shielded plates with diameters of 80 mm, 100 ram, 120 mm were applied in arc ion plating system, which were placed in the meddle position between the target and the substrate frame. The coatings with shield plate were in comparison with the one without a plate. The composition and microstructure of coatings were characterized by scanning electron microscopy, energy dispersive spectroscopy and X -ray diffraction. Their mechanical and tribological properties were determined by a microhardness tester, scratch and wear experiments. The results show that Ti content reduced while A1 content in the TiA1N coatings increased with the increase of shielded plate size. The number of macroparticles on the surface and deposition rate decreased obviously. Increased the size of shielded plate decreased significantly the hardness and the adhesion strength of TiA1N coating. Friction coefficient and wear resistance of TiAlN coating with shielded plate were higher than that of the coating without shielded plate due to the formation of different kinds of pits.

关 键 词：电弧离子镀 TIALN 挡板 微观结构 摩擦学性能 

分 类 号：TG174.444[金属学及工艺—金属表面处理]