单片集成10信道多波长光源  

Monolithically Integrated 10-Channel Multi-Wavelength Light Sources

作　　者：张灿[1] 朱洪亮[1] 梁松[1] 韩良顺[1] 王圩[1] 

机构地区：[1]中国科学院半导体研究所半导体材料重点实验室,北京100083

出　　处：《中国激光》2013年第12期1-5,共5页Chinese Journal of Lasers

基　　金：国家863计划(2011AA010303;2012AA012203);国家自然科学基金(61021003;61090392);国家973计划(2011CB301702)

摘　　要：采用选择区域外延生长技术和对接再生长技术，设计并制作了10信道分布反馈激光器阵列与多模干涉耦合器的单片集成器件。器件中采用了新的技术，集成了钛薄膜热电阻用于波长调谐。集成器件烧结到热沉上后，在25℃温控条件下测试，激光器阵列的平均信道间隔为1．29nm，阈值电流为22～30mA；当激光器注人电流为200mA，各信道的平均出光功率为0．5mw。集成热电阻的调谐效率约为5nm／w，通过施加合适的热电流调谐，该集成器件可以覆盖34路信道间隔为50GHz的波长范围。集成器件可单波长选择输出，也可10信道同时运作合波输出。A monolithic integration of ten distributed feedback lasers with a 10 × 1 multimode-interference optical combiner using the selective area growth technology is proposed and demonstrated. In the device, Titanium film thermal resistance for wavelength tuning are integrated with a novel procedure. The device is mounted on heat sink and tested at 20 ℃. The average channel spacing of the device is 1.29 nm. The average output power of lasers is 0.5 mW with a current of 200 mA and threshold currents of 25-30 mA. The tuning efficiency of integrated thermal resistance is about 5 nm/W. The integrated device can cover 34 channels on the 50 GHz ITU （international telecommunication union） grid with a suitable heating power, which can operate separately or simultaneously.

关 键 词：集成光学 分布反馈激光器阵列 选择区域外延生长 多模干涉耦合器 光通信 

分 类 号：TN256[电子电信—物理电子学]