多孔Si_3N_4高温有氧环境下介电性能试验研究  

Study of Dielectric Properties of Porous Silicon Nitride Under High Temperature and Aerobic Condition

作　　者：陈聪慧[1] 何凤梅[1] 李琦[1] 杨景兴[1] 胡子君[1] 黄娜[1] 

机构地区：[1]航天材料及工艺研究所

出　　处：《航空制造技术》2013年第23期150-153,共4页Aeronautical Manufacturing Technology

摘　　要：提出高温有氧环境下介电性能测试方案，并对多孔LSi3N4材料进行了7～18GHz高温有氧介电性能测试，得到了相应的随温度和频率变化数据及曲线结果表明测试方案有效可行，测试结果可见，在7～18GHz频段，测试频率对多孔LSi3N4材料的介电性能测试结果无明显影响同时，在升温过程中，介电常数逐渐增加，增幅不大；损耗角正切增加较快。Dielectric properties testing pro- posal under high temperature and aerobic condition is brought forward. Testing of porous silicon nitride under the frequencies of 7-18GHz is carried out, and data and curve with temperature and frequency change are obtained. It proves that the testing proposal is available. Results show that testing frequencies have no dominant effect on the dielectric properties of porous silicon nitride under the frequency of 7-18GHz. Dielectric constant grows mildly with temperature rising, but loss tangent increases quite last, which relates to the conductance loss accretion of electron and impurity hydronium.

关 键 词：多孔LSi3N4高温有氧介电性能 

分 类 号：V250.2[一般工业技术—材料科学与工程]