用于狭缝中的SAW应力传感器的设计与制作  

Design and Process of SAW Stress Sensor in Slit

作　　者：李海宁[1] 丁杰雄[1] 姜忠[1] 付陆元[1] 

机构地区：[1]电子科技大学机械电子工程学院,四川成都611731

出　　处：《压电与声光》2013年第6期771-774,778,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(11076007)

摘　　要：为了对两曲面狭缝间的作用力进行监测,设计了一种基于声表面波(SAW)传感原理的无源无线应力传感器。首先,讨论了狭缝间作用力测量的传感技术方案,分析了弹性介质中力敏结构模型,进而确定了SAW谐振器的尺寸;其次,结合微机电系统(MEMS)加工工艺研究了该器件的制作工艺方案,包括SAW谐振器、支撑基底、传输线的制作。通过对SAW传感器设计与制作过程的探究,可为狭缝空间等极端环境中物理量的测量提供新的思路。A passive and wireless pressure sensor based on surface acoustic wave（SAW） was proposed in order to measure the pressure in slit between two curved surfaces.Firstly,the sensing scheme about curved slit stress measuring was discussed.The force-sensitive structure model in elastic medium was analyzed and the detailed sizes of SAW resonator were determined.Secondly,combining with MEMS process manufacture of the device was researched including the process of SAWR,supporting bases and transmission line.By exploring this passive and wireless SAW measuring method,the new thoughts were valuable for physical measurement in extreme environment such as slits.

关 键 词：声表面波(SAW) 无源无线应力传感器 曲面狭缝 力敏结构 制作工艺 

分 类 号：TN65[电子电信—电路与系统] TP73[自动化与计算机技术—检测技术与自动化装置]