初应力对FBAR厚度剪切模态谐振特性的影响  

Effects of Initial Stresses on Resonance Properties of FBAR in Thickness-Shear Mode

作　　者：黄德进[1] 罗昕逸 王骥[1] 

机构地区：[1]宁波大学机械工程与力学学院,浙江宁波315211

出　　处：《压电与声光》2013年第6期788-791,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金重点资助项目(10932004);浙江省重点科技创新团队基金资助项目(2011R09025-02);浙江省自然科学基金资助项目(LY12F01015);浙江省教育厅重点科研基金资助项目(Z201018143);宁波市自然科学基金资助项目(2011A610183)

摘　　要：研究了含初应力压电薄膜体声波谐振器(FBAR)厚度剪切振动的谐振特性。利用含初应力压电材料的压电弹性基本方程,推导出理想FBAR在正弦激励电压作用下的振动方程。然后根据边界条件,求出问题的解,得到了串联和并联谐振频率,并讨论了初应力对谐振频率、带宽和有效机电耦合系数的影响。给出了具体的数值算例,所得结果对于提高和改善FBAR的性能有参考意义。This paper studied the resonance properties of Film Bulk Acoustic Resonator （FBAR） with initial stress in thickness-shear mode.Based on the fundamental piezoelastic equations of piezoelectric material with initial stresses,the vibration equation of ideal FBAR under sine excitation voltage is derived.The solution is then obtained by using the boundary conditions.The series and parallel resonance frequency are listed,and the effects of initial stresses on resonance frequency,bandwidth,and effective electromechanical coupling coefficient are discussed.A numerical example is presented to show the effects.These results are very useful for the improvement of FBAR performance.

关 键 词：薄膜体声波谐振器 初应力 谐振频率 带宽 有效机电耦合系数 

分 类 号：TN015[电子电信—物理电子学] TN752