高精度硅压阻式气压计设计  

Design of silicon piezoresistive barometer with high-precision

作　　者：高磊[1] 马英辉[2] 刘祎[1] 毛万华[3] 

机构地区：[1]宿迁学院机电工程系,江苏宿迁223800 [2]宿迁学院计算机科学与技术系,江苏宿迁223800 [3]南京航空航天大学理学院,江苏南京211100

出　　处：《工矿自动化》2013年第12期21-25,共5页Journal Of Mine Automation

基　　金：江苏省重大科技支撑与自主创新项目(BE2012732);宿迁市市级科技创新专项资金计划项目(Z201102);宿迁学院科研基金项目(2013KY38)

摘　　要：针对硅压阻式气压传感器因温漂、离散性大而使其应用受限的问题,设计了一种高精度硅压阻式数字气压计。该气压计采用全温度范围的曲面拟合算法进行温度补偿和线性化处理,解决了硅压阻式气压传感器的温漂和非线性问题;在ATmega88PA微控制器内采用软件实现压力数据的温度补偿,并通过RS485接口将数据发送给上位机。测试结果表明,在-40～+60℃范围内,该气压计测量误差在0.50‰以内,满足设计要求。In view of problems of temperature drift and big discreteness of silicon piezoresistive pressure sensor which cause application of the pressure sensor to be limited, a silicon piezoresistive and digital barometer with high-precision was designed. The barometer uses surface-fitting algorithm with whole temperature range to make temperature compensation and linear processing, so as to solve problems of temperature drift and nonlinear of the silicon piezoresistive pressure sensor, and uses software to realize temperature compensation of pressure data in ATmega88PA micro-controller and sends the data to upper computer through RS485 interface. Test result shows that measuring error of the barometer is less than 0.50‰ in range of -40～＋60℃ and the barometer meets design requirement.

关 键 词：气压计 硅压阻式气压传感器 曲面拟合 温度补偿 

分 类 号：TD67[矿业工程—矿山机电]