Xe介质极紫外光源时间特性及最佳条件研究  

Time behavior and optimum conditions for the Xe gas extreme ultraviolet source

作　　者：赵永蓬[1] 徐强[1] 肖德龙[2] 丁宁[2] 谢耀[3] 李琦[1] 王骐[1] 

机构地区：[1]哈尔滨工业大学,可调谐(气体)激光技术国家级重点实验室,哈尔滨150080 [2]北京应用物理与计算数学研究所,北京100088 [3]中国科学院长春光学精密机械与物理研究所,应用光学国家重点实验室,长春130033

出　　处：《物理学报》2013年第24期215-221,共7页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:60838005);国家科技重大专项(批准号:2008ZX02501)资助的课题~~

摘　　要：理论和实验上研究了Xe介质毛细管放电极紫外光源等离子体时间特性和最佳条件.从理论上建立了Xe介质一维辐射磁流体力学模型,模拟了不同气压和电流条件下等离子体压缩和辐射特性;实验上测量了放电电流30 kA时不同气压条件下13.5 nm(2%带宽)动态特性.理论和实验结果表明:不同放电电流条件下,存在最佳气压值,最佳气压随着电流的增加而增加;同时,电流增加时,13.5 nm(2%带宽)辐射光强峰值时刻减小.The time behavior and the optimum conditions for the Xe gas capillary discharge extrem ultraviolet source are investigated theo- retically and experimentally. By setting up a one-dimensional magneto-fluid-mechanics model, the plasma compressing characteristics and the emission characteristics are simulated under different gas pressures and different discharge currents. The time characteristic and the intensity of the 13.5 nm（2% bandwidth） emission are measured experimentally. The theoretical and experimental results show that there are the optimum gas pressures for different discharge currents. Meanwhile, the optimum gas pressure increases with the discharge current increasing. Moreover, the time to generate the highest 13.5 nm（2% bandwidth） emission should decrease by the in- crease of the discharge current. All the results should be useful to better understand the plasma condition for the discharge experiments and the EUV source. And it can be used to increase the power of the extreme ultraviolet source as well.

关 键 词：极紫外光刻光源 毛细管放电 磁流体力学 Xe等离子体 

分 类 号：TN23[电子电信—物理电子学] O361.3[理学—流体力学]