洁净系统中激光诱导颗粒污染物的分析与评估  

ANALYSIS AND EVALUATION OF CONTAMINANT PARTICLES FROM THE EFFECT OF LASER TO MATERIALS IN CLEAN SYSTEM

作　　者：李丹明[1] 孙小菁[1] 叶自煜[1] 朱忠奎[1] 

机构地区：[1]兰州空间技术物理研究所 空间环境材料行为及评价技术重点实验室,甘肃兰州730000

出　　处：《真空与低温》2013年第4期203-207,共5页Vacuum and Cryogenics

摘　　要：高功率激光系统要求在洁净环境中运行,若光学元件表面在工作过程中附着污染物,将导致光学元件的损伤及整个系统负载能力的下降。针对洁净系统中激光与材料作用而产生的颗粒物,分析其作用机制,探讨用于评估的理论依据,讨论测量的需求和方法,并对系统表面存在的颗粒污染物进行了实际测量分析,提出了深入开展高功率激光系统中颗粒污染物测量与评估的技术途径。High power laser system need to be run in a clean environment. If the surface of the optical element attached pollutants in the work process, it will do a damage to the optical components and lead to decline in the load capacity of the entire system. The mechanism of laser affecting to materials which produced particles was analysed. The theoretical basis for the assessment was probed. The requirement and method of measurement was discussed . The contaminant particles which exist in the system surface were measured and analysed. At last, we proposed the technical approachto carry out measurement and assessment of contaminant particles in the high power laser systementirely and deeply.

关 键 词：洁净系统 激光与材料作用 颗粒污染物 分析与测量 

分 类 号：TB753[一般工业技术—真空技术]