基于时序分析的光刻版清洗机运行效率提升方法  

A Method for Stepping up the Run Efficiency of the Photomask Cleaning System Based on Timing Analysis

作　　者：侯为萍[1] 高建利[1] 刘玉倩[1] 

机构地区：[1]中国电子科技集团公司第四十五研究所,北京101601

出　　处：《电子工业专用设备》2013年第12期36-38,共3页Equipment for Electronic Products Manufacturing

摘　　要：光刻版清洗机是典型的多轴运行类自动化清洗设备,清洗效率的提升是此设备的关键技术之一。介绍了一种基于时序分析的提升该设备运行效率的方法,实验证明此方法通过对控制时序的分析和优化,有效提升了设备的运行效率。The photomask cleaning system is typical automatic cleaning equipment with multi axis running, and stepping up the run efficiency is one of the pivotal techniques of the equipment. This paper introduces a method for stepping up the run efficiency of the equipment based on timing analysis, and the experiment proves that the method steps up the run efficiency of the equipment effectively through analyzing and optimizing the control timing.

关 键 词：光刻版清洗机 时序分析 运行效率 

分 类 号：TN305.97[电子电信—物理电子学]