基于二维SEM图像的纳米操作三维信息提取  

3D Information Extraction of Nanomanipulation Based on 2D SEM Images

作　　者：李东洁[1] 邹佳鸥 宋鉴[1] 张丽[1] 

机构地区：[1]哈尔滨理工大学自动化学院,黑龙江哈尔滨150080

出　　处：《哈尔滨理工大学学报》2013年第6期29-33,37,共6页Journal of Harbin University of Science and Technology

基　　金：国家自然科学基金青年基金(51105117);哈尔滨市科技创新人才研究专项资金(2012RFQXG075);哈尔滨理工大学青年拔尖创新人才培养计划资助(2013)

摘　　要：针对基于SEM的遥控纳米操作系统中快速有效的获取探针的平面及深度信息这一问题,提出了边缘检测算法+遍历比较+预测补偿的方法对探针的X-Y方向位置信息进行提取.通过对SEM二维图像隐含信息的统计分析,提出了基于兴趣区域的灰度方差统计对探针Z向位置(深度)进行提取的方法.最后,对某次纳米线转移实验中采集到的实时SEM图像进行探针针尖的x-y方向信息提取及Z向位置与图像方差进行MATLAB拟合,证明了上述方法的合理性及有效性.Aiming at the problem of how to get the plane and depth information of the probe quickly and effi- ciently in SEM-based telenanomanipulation system, the edge detection algorithm, traverse comparison and predic- tive compensation method is proposed to extract the X-Y direction position information of the probe. Through the statistical analysis of two dimensional SEM image implied information, the gray variance statistics method based on region of interest is proposed to extract the Z direction position （depth） information of the probe. Finally, the ra- tionality and effectiveness of the proposed methods are verified through extracting X-Y direction information of the probe, fitting the relationship between Z directional information and image variance with MATLAB based on the col- lected SEM image sequence in nanowire transfer experiments.

关 键 词：纳米操作 信息提取 SEM图像 

分 类 号：TP249[自动化与计算机技术—检测技术与自动化装置]