薄膜材料热物性测量的FDTR信号敏感度比较  

Comparative study on sensitivities of frequency-domain thermoreflectance methods during the thin-film material thermophysical property measurement

作　　者：徐先锋[1,2] 唐大伟[1] 

机构地区：[1]中国科学院工程热物理研究所,北京100190 [2]中国科学院大学,北京100049

出　　处：《中国科学院大学学报（中英文）》2014年第1期32-37,共6页Journal of University of Chinese Academy of Sciences

基　　金：国家自然科学基金(50876103)资助

摘　　要：基于光热反射技术的原理,采用柱坐标下的傅里叶导热模型,以矩阵传递的形式,推导并计算得出连续型、脉冲型频域光热反射法(FDTR)的理论相位表达式,比较了二者测量2种常见结构的信号敏感度,得到具有不同基底热导率、薄膜热导率、界面热导的薄膜材料的FDTR实验测量方法选择的理论依据.结果表明,结合最佳拟合频率段的选取,采用合适的FDTR测量方法,可得到更高精度的材料热物性参数测量结果.Based on Fourier＇s thermal conduction law, we deduced theoretical phase expressions with respect to frequency in continuous-wave and pulsed frequency-domain thermoreflectance （FDTR） methods by a transfer matrix thermal analysis way. Comparisons of sensitivities between the two methods in two common types of systems are made, and the results lead to theoretical basis for selection of FDTR methods in experimental measurements. The results show that high accuracies of film material thermal properties in experimental test are available with an appropriate FDTR method as well as the best frequency range for fitting.

关 键 词：连续型 脉冲型FDTR 层状结构 热导率 界面热导 敏感度分析 

分 类 号：TB383.1[一般工业技术—材料科学与工程]