彩色PDP喷砂工艺的障壁层清除速率和工艺稳定性研究  

Studies of Rib Paste Ablation Rate and Sand Blasting Process Control in Color Plasma Display Panel Fabrication

作　　者：刘忠安[1] 

机构地区：[1]南京电子器件研究所国家平板显示工程技术中心,南京210016

出　　处：《真空科学与技术》2000年第6期454-456,共3页Vacuum Science and Technology

基　　金：国家自然科学基金青年基金!资助项目 (5 970 2 0 0 5 )

摘　　要：提出了彩色PDP喷砂工艺障壁层清除速率的测量公式和减小测量误差的方法 ,讨论了影响清除速率的相关参数及用清除速率定量控制喷砂工艺的条件。指出高耐磨并采用特殊设计的喷头是提高喷砂工艺稳定性和可控性的关键 ,小孔径圆柱状喷头不适用于大生产喷砂工艺。A novel technique to accurately evaluate rib ablation rate has been successfully developed to increase the accuracy in sand blasting process,a key process in color plasma display panel (PDP) fabrication.Various factors affecting the rib ablation rate as well as the necessary conditions under which the ablation rate can be used to quantitatively control sand blasting process were discussed.We found that a high wear resistant nozzle in special shape plays a key role in increasing the stability and controllability of the sand blasting process,whereas a small aperture cylinder shaped nozzle often fails in industrial production of PDP.

关 键 词：障壁层清除速率 喷砂工艺 彩色等离子体显示器 

分 类 号：TN141.5[电子电信—物理电子学]