绝缘体上硅微环谐振腔电光调制器的分析与最优设计  

Analysis and Optimum Design of Silicon-on-insulator Micro-ring Resonator Electro-optic Modulator

作　　者：韦丽萍[1] 王永华[1] 臧俊斌[2] 崔丹凤[1] 李艳娜[1] 刘耀英[1] 薛晨阳[1,3] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学朔州校区,山西朔州036000 [3]中北大学电子测试技术国家重点实验室,太原030051

出　　处：《光子学报》2013年第12期1473-1477,共5页Acta Photonica Sinica

基　　金：国家自然科学基金(No.61076111)资助

摘　　要：针对高频电光调制器的应用需求,提出了一种基于绝缘体上硅微环谐振腔的P-I-N型电光调制器.利用散射矩阵法描述了微环谐振腔谐振特性机理,结合等离子体色散效应中载流子浓度对硅有效折射率变化的影响,系统分析了微环谐振腔电光调制器的理论模型.在此基础上,利用Rsoft仿真软件对脊型波导截面光场分布进行了仿真分析,得到了光场局域性能较优的脊型纳米波导微环谐振腔设计;结合Sentaurus TCAD仿真软件对不同掺杂浓度下的P-I-N型二极管性能进行了仿真计算,理论得出了Q值仅为5×103时频移量达58.74GHz的微环谐振腔最优电光调制器结构,为电光调制器的深入研究提供了理论参考.Aiming at application requirements of high-frequency electro-optic modulators, a P-I-N type electro-optic modulator based on SOl resonator has been proposed. Describing the resonance characteristic of micro-ring resonator via the Scattering Matrix Method, combining the variation of effective refractive index of silicon resulted from carrier concentration changing, the plasma dispersion effect, analyzing the theoretical model of the micro-ring resonator electro-optic modulator systematically. Based on the simulation and analysis of the cross-section optical field distribution of rib waveguide by Rsoft simulation software, a design of rib waveguide micro-ring resonator with better performance of optical field confinement has been obtained. Furthermore, the performance of the P-I-N type diode for different doping concentrations has been simulated by Sentaurus TCAD simulation software. Finally, a blue shift of 58. 74GHz is achieved from the theoretical model. It is demonstrated that the optimum design of the electro-optic modulator is reasonable and meaningful in further study of electro-optic modulator.

关 键 词：等离子体色散效应 微环谐振腔 电光调制器 脊型波导 P—I—N型二极管 

分 类 号：TN252[电子电信—物理电子学] TN256