有机敏感材料梳状电极电容式SO_2传感器的研究  

Research on Sensor of SO_2 with Organic Sensing Material and Interdigital Capacitors

作　　者：李丽[1] 王道[1] 刘显武[1] 

机构地区：[1]北京工业大学环境与能源工程学院,北京100022

出　　处：《化学传感器》2000年第4期9-13,共5页Chemical Sensors

摘　　要：煤燃烧产生的SO_2是大气污染的重要来源。化学传感器法是监测SO_2的实用方法之一,开发研制实时、原位监测SO_2的化学传感器,对于控制酸沉降十分必要。梳状电极电容式(IDC)SO_2传感器的原理是SO_2能够与有机物中的某些基团形成可逆的弱加合物,改变电介质的介电常数,使电容发生变化。可将对SO_2敏感的物质制成薄膜电容器,与一信号处理回路相连。当其暴露在一定浓度的SO_2气体中时,会导致IDC的电容发生变化。本文采用氧化硅片为基质制成IDC,用溶胶—凝胶技术将不同的有机敏感材料涂覆于其上,测定不同条件下的IDC的电容。得到此种电容的变化值与SO_2的浓度、敏感层的厚度的关系。The SO2 given from coal's burning is one of the main pollutants in the air. Using chemical sensors is a method to determine the concentration of SO2,and developing realtime and on-site SO2 chemical sensor is necessary for the control of acid-depositing. The in-terdigital capacitor (IDC) sensor for SO2 is based on the mechanism that SO2 can form weak adduct and change it's dielectric constant thus result in the change of it's capacitance. Therefore capacitor can be made with a thin film of SO2 sensing chemicals and connected with a signal processing circuit,and when it is exposed to a certain concentration of SO2, IDC's capacitance will change. Quartz glass is employed for the IDC's substrate,which is coated with various organic materials by sol-gel process. It's proved that there is a relationship between the concentrations of SO2 and the thickness of the sensitive films.

关 键 词：梳状电极电容器 浓度 二氧化硫 化学传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]